JNTU
JNTU B.Tech IV MEMS Previous Question Paper (January/February - 2023 - R18)
Note: i) Question paper consists of Part A, Part B. ii) Part A is compulsory, which carries 25 marks. In Part A, Answer all questions. iii) In Part B, Answer any one question from each unit. Each question carries 10 marks and may have a, b as sub questions.
Part A
List the applications of MEMS.
Answer
MEMS applications include automotive systems (airbag sensors, pressure sensors), biomedical devices (lab-on-a-chip, pacemakers), consumer electronics (accelerometers in smartphones, microphones), and aerospace/defense (inertial navigation systems, gyroscopes).
Explain MEMS markets in brief.
Answer
The MEMS market is driven by high-volume consumer electronics, automotive safety and control systems, and the healthcare sector. It is characterized by a transition from specialized, high-cost niche applications to mass-produced, low-cost integrated systems, with significant growth in IoT-enabled sensor networks and wearable technology.
List the limitations of surface micromachining.
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Label the applications of bulk micromachining.
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List the limitations of mechanics of MEMS materials.
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What is the significance on characterization of mechanical parameters?
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List the MEMS devices.
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Outline the limitations of electromagnetic Microactuators.
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List the types of flow.
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Explain continuity equation.
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Part B
Analyze MEMS foundries in detail.
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Explain lithography technique in detail.
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Evaluate the working principle of oxidation -film deposition with neat sketch.
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Justify the basic process flow in surface micromachining.
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Discuss about MEMS–RIE–DRIE.
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Estimate LIGA process with neat diagram and its significance in detail.
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Evaluate measurement of mechanical parameters in detail.
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Explain material properties of MEMS materials.
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Analyze residual stress boundary conditions and spring combinations with microstructural elements in detail.
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Explain working of any one accelerometer.
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Analyze any one temperature sensor in detail.
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Discuss the working principle of Gyroscopes.
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Explain working of piezoelectric microactuators.
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Evaluate the working of electrophoresis and electro osmosis in detail.
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Discuss electro kinetics in detail.
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Analyze Lab on a Chip in micro fluidics in detail.
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