JAWAHARLAL NEHRU TECHNOLOGICAL UNIVERSITY HYDERABAD

Pre-requisites

Nil.

Course Objective

To provide knowledge of fabrication process and applications.

Course Outcomes

Upon completion of this course the student shall be able to apply his

instrumentation knowledge and understand MEMS fabrication and its use in the industries.

UNIT - I

Introduction to MEMS: MEMS; Use of MEMS. Fabrication process The Substrate and adding material to it: Introduction, The silicon substrate, Additive technique: Oxidation, Additive technique: Physical vapour deposition, other additive techniques.

UNIT - II

MEMS Fabrication: Creating and transferring patterns - Photolithography: Introduction, keeping it clean, Photoresist, Working with resist, masks, Resolution, Permanent resists. Creating structures-Micromachining: Introduction, Bulk Micromachining processes, Surface Micromachining, Process Integration.

UNIT - III

MEMS Transducers - I: Thinking about modelling: What is modeling? Units, The input-output concept, Physical variables and notation, preface to the modeling chapters. MEMS Transducers-An overview of how they work: What is a transducer? Distinguishing between sensors and actuators, Response characteristics of transducers, MEMS Sensors: Principles of operation, MEMS Actuators: Principles of operation, Signal conditioning, RF applications and Optical applications. Piezoresistive transducers: Introduction, Modeling Piezoresistive transducers, Piezoresistive pressure sensor.

UNIT - IV

MEMS Transducers- II: Capacitive transducers: Introduction, Capacitor fundamentals, Modeling a capacitor sensor, Capacitive accelerometer.

UNIT - V

MEMS Transducers- III: Piezoelectric transducers: Introduction, Modeling piezoelectric materials, Mechanical modelling of beams and plates, Cantilever piezoelectric actuator.

R16 B.TECH EIE.

Thermal transducers: Introduction, Basic heat transfer, Hot-arm actuator.

TEXT BOOKS:

• 1. Introductory MEMS- Fabrication and Applications - Adams, Thomas M., Layton, Richard A., Spinger, 2010.

REFERENCE BOOKS:

• 1. MEMS and Microsystems: Design and manufacture, Tai-Ran Hsu ,McGraw-Hill, 2002
• 2. MEMS: Applications Mohamed Gad-el-Hak, CRC Press, 29-Nov-2005 R16 B.TECH EIE.