JAWAHARLAL NEHRU TECHNOLOGICAL UNIVERSITY HYDERABAD

UNIT - I

Introduction, Integrated Circuits, MEMS, Micro sensors, Micro actuators, Microelectronics Fabrication, Micromachining, Mechanical MEMS, Thermal MEMS, MOEMS, Magnetic MEMS, RF MEMS, Microfluid systems, Bio and Chemo-devices, Nanotechnology, Modeling and Simulation. Micromachining: Introduction, Photolithography, Structural and sacrificial materials, other lithography methods, Thin film deposition, Impurity doping, Etching, Problems with bulk Micro machining, Surface Micromachining, Bulk Vs. Surface micromachining.

UNIT - II

System Modeling and Properties of Material: Introduction, Need for modeling, system types, Basic Modeling elements in mechanical systems, Electrical systems, Fluid systems and Thermal systems, Translational pure mechanical system with spring, damper and mass- Rotational pure mechanical system with spring, damper and mass Passive components and systems: Introduction, System-on-a-chip, Passive electronic systems, Passive mechanical systems

UNIT - III

Mechanical Sensors and Actuators: Introduction, Principles of sensing and actuation, Beam and cantilever, Micro plates, Capacitive Effects, Piezo electric material as sensing and actuating elements, strain measurement, pressure measurement, Flow measurement using Integrated paddle-cantilever structure. Thermal Sensors and Actuators: Introduction, Thermal energy basics and heat transfer processes, Thermistors, Thermo devices, Thermocouple, Micro machined thermocouple probe, Peltier effect heat pumps, Thermal flow sensors, Micro hot plate gas sensors, Shape memory Alloys, U-shaped horizontal and vertical Electro thermal Actuator, Thermally activated MEMS Relay.

UNIT - IV

Micro-opto-Electromechanical systems: Introduction, fundamental principle of MOEMS Technology, Review on properties of Light, Light modulators, Beam Splitter, Microlens, Micro mirrors, Digital micro mirror device, Light detectors, Grating Light valve, Optical switch, Waveguide and tuning, Shear – Stress measurement. Magnetic Sensors and Actuators

UNIT - V

Radio frequency MEMS: Introduction, Review of RF-based communication systems, RF, MEMS, MEMS Inductors, Varactors, Tuner / Filter, Resonator, Clarification of Tuner, Filter, Resonator, MEMS Switches, Phase Shifter, Micro fluidic Systems, Introduction, Applications.

R16 B.TECH MECHATRONICS.

TEXT BOOKS:

• 1. MEMS, Nitaigour Premchand Mahalik, TMH
• 2. MEMS & Micro Systems Design and Manufacture, Tai-Ran HSU, TMH, 2006

REFERENCES:

• 1. Mechatronics Systems Fundamentals – Rolf Isermann – Springer International Edition
• 2. The Science and Engineering of Microelectronic Fabrication, 2nd Ed. By S.A. Cambell, Published by Oxford University Press (2001
• 3. Fundamentals of Micro Fabrication: The science of Miniaturization, 2nd Edition by M.J. Madou, published by CRC press (2002)
• 4. Introductory MEMS: Fabrication and Applications by Adams, Thomas M, Layton Richard A., 1st Edition 2010 IBNL 978-0-387-09510-3, Springer
• 5. Microsystems Design, Stephen D. Senturia, Springer International Edition R16 B.TECH MECHATRONICS.