JAWAHARLAL NEHRU TECHNOLOGICAL UNIVERSITY HYDERABAD

Course Objectives:

• 1. To provide understanding of MEMS/NEMS applications specially sensors, Micro machining tools etc.,
• 2. To provide silicon micro fabrication techniques etc.,
• 3. To bring out scaling and packaging issues of physical system

UNIT - I

Overview and Introduction: New Trends in Engineering and Science: Micro and Nanoscale Systems: Introduction to Design of MEMS and NEMS. Biological and Biosystems Analogies. Overview of Nano and Microelectromechanical Systems. Micro and Nanoelectromechanical Systems. Synergetic Paradigms in MEMS. MEMS and NEMS Architectures

UNIT - II

Fundamentals of MEMS Fabrication: Introduction and Description of Basic Processes. Microfabrication and Micromachining of ICs, Microstructures and Microdevices. MEMS Fabrication Technologies. Bulk Micromachining, Surface Micromachining. High Aspect Ratio Technology

UNIT - III

Devising and Synthesis of MEMS and NEMS: MEMS Motion Microdevices Classifier and Synthesis. Microelectromechanical Microdevices. Synthesis and Classification Solver. Nanoelectromechanical Systems.

UNIT - IV

Modeling of Micro Electromechanical Systems, Devices, and Structures: Introduction to Modeling, Analysis and Simulation. Electromagnetics and its Application for MEMS and NEMS. Basic Foundations in Model Developments of Micro and Nanoactuators in Electromagnetic Fields. Lumped-Parameter Mathematical Models of MEMS. Direct-Current Microtransducers. Induction Micromachines: Two Phase and Three Phase. Synchronous Microtransducers: Single-Phase Reluctance Micromotors. Permanent-Magnet Synchronous Microtransducers. Microscale Permanent-Magnet Stepper Micromotors: Mathematical Model in the Machine Variables, Permanent-Magnet Stepper Micromotors in the rotor and synchronous reference frames. Piezotransducers: Steady-State Models and Characteristics, Mathematical Models of Piezoactuators: Dynamics and Nonlinear Equations of Motion. Fundamentals of Modeling of Electromagnetic Radiating Energy.

R16 B.TECH MSNT.

UNIT - V

Modeling of Nanoscale Electromechanical Systems, Devices and Structures: Classical Mechanics and Its Application: Newtonian Mechanics, Lagrange Equation, Hamilton Equations of Motion. Thermolysis and Heat Equation. Atomic Structures and Quantum Mechanics, Molecular and Nanostructures Dynamics: Schrodinger Equation and Wave function Theory. Density Functional Theory. Nanostructures and Molecular Dynamics. Electromagnetic Fields and their Quantization. Molecular Wires and Molecular Circuits.

TEXT BOOKS:

• 1. “MEMS and NEMS: Systems, Devices and Structures” by Sergey Edward Lyshevski, CRC press, 2002 edition.
• 2. An introduction to Micro electro mechanical systems Engineering” by Nadim Malut and Kirt Williams – Second edition – Artech House, Inc, Boston.
• 3. “Micro electro mechanical systems Design”./ by James J Allen- CRC Press – Taylor and Francis Group. R16 B.TECH MSNT.