JAWAHARLAL NEHRU TECHNOLOGICAL UNIVERSITY HYDERABAD

UNIT - I

Introduction, Integrated Circuits, MEMs, Micro sensors, Micro actuators, Microelectronics, Fabrication, micromachining, Mechanical MEMS, Thermal MEMs, MOEMS, Magnetic MEMEs, RF MEMS, Micro fluid systems, Bio and thermo-devices, Nanotechnology, Modeling, Simulation. Micromachining: Introduction, Photolithography, Structural and sacrificial materials, other lithography methods, Thin film deposition, impurity doping, etching, Problems with bulk Micro Machining, Surface Machining, Bulks.

UNIT - II

System Modeling and properties of Material: Introduction, Need for modeling, system types, basic Model elements in mechanical systems, Electrical system, Fluid system and Thermal systems, Translational pure mechanical system with spring, damper and mass –Rotational pure mechanical system with spring, damper and mass –Rotational pure mechanical system with spring, damper and mass. Passive Components and systems: Introduction, system-on-a-chip, passive electronic systems, passive mechanical systems.

UNIT - III

Mechanical Sensors and Actuators: Introduction, Principles of sensing and actuation, Beam and cantilever, Micro plates, captive Effects, Piezo Electric Material as sensing and actuating elements, strain measurement, pressure measurements, flow measurement using integrated paddle cantilever structure. Thermal sensors and actuators: Introduction, Thermal energy basics and heat transfer process, Thermistors, Thermo devices, Thermocouple, Micro machined thermocouple probe, Peltier effect heat pumps, Thermal flow sensors, Microhot plate gas sensors, shape memory Alloys, U-shaped horizontal and vertical Electrothermal Actuators, Thermally activated MEMEs relay.

UNIT - IV

Micro-Opto-Electromechanical systems: Introduction, fundamental principle of MOEMs Technology, Review on properties of light, Light Modulators, beam Splitters, Microlense, Micro mirrors, digital micromirror device, light detectors, grating light valve, optical switch, waveguide and tuning, shear Stress measurement, Magnetic Sensors and actuators.

UNIT - V

Radiofrequency MEMS: Introductions, Review of RF –based communication systems, RF MEMs, MEMs Inductors, varactors, tuners/filter, resonator, clarification of Tuner, filter, resonators, MEMS switches, phase shifter, Micro fluidic systems, Introduction, Applications.

TEXT BOOKS:

• 1. MEMS, Nitaigour Premchand Mahalik, TMH.
• 2. MEMS & Micro Systems design and Manufacture, Tai-ran HSU, TMH, 2006.

REFERENCE BOOKS:

• 1. Mechatronics Systems Fundamentals-Rolf Isermann-Springer International Edition.
• 2. The science and engineering of Micro Electronic Fabrication, 2nd ed. By. S.A. Cambell, Published by Oxford University Press (2001).
• 3. Fundamentals of Micro Fabrication: The science of Miniaturization, 2nd Edition by M.J. Madou, published by CRC Press (2002).
• 4. Introductory MEMS: Fabrication and application by Adams, Thomas M. Layton Richard A., 1st Edition 2010 IBNL 978-0-387-09510-3, Springer.
• 5. Microsystems Design, Stephen D.Senturia, Springer International Edition.