JAWAHARLAL NEHRU TECHNOLOGICAL UNIVERSITY HYDERABAD

UNIT - I

Mems and Microsystems: Mems and Microsystems-General principles, advantages, materials used- properties, Technology involved in MEMS. Fabrication techniques- Lithography- etching- Ion implantation- wafer bonding. Integrated processing- Bulk Micro machining- Surface micro machining- coating technology and CVD- LIGA process. .

UNIT - II

Microsensors and Microactuators: Microsensors and Microactuators –working principle, types- pressure sensors, thermal sensors and actuators, piezoelectric crystals-Intelligent materials and structures, Magnetic sensors and actuators- magnetic materials used for MEMS.

UNIT - III

Mems and Microfluidic System: Principle of MOEMS- light modulator, beam splitter, digital micro mirror device, light detectors and optical switch. Micro fluidic System- Fluid actuation method, dielectrophoresis, micro fluid dispenser, micro needle, micro pumps. Application of BioMEMS: Healthcare, drug delivery, micrototal analysis system detection and measurement methods, electronic nose, biochip.

UNIT - IV

Introduction to Nanotechnology: Essence of Nanotech, Nanofying electronics, Properties of nanomaterials, metal nano clusters, semiconductor nanoparticles, nano composites. Introduction to carbon nanostructure, carbon molecules, carbon clusters, nanotubes application.

UNIT - V

Medical Applications of Nanotechnology: Nanotechnology and Biomedicine-Drug synthesis and delivery – Nanobiomedicine and diagnostic-nano fabrication methods-nanomaterials in human body- toxicity in nanomaterials.

TEXT BOOKS:

• 1. Tai Ram Hsu, “Mems and Microsystems, Design and Manufacture”, McGraw Hill, 2002.
• 2. Mohamed Gad-el-Hak, “MEMS: Introduction and Fundamentals”, CRC Press, 2005.
• 3. Neelina H. Malsch, “Biomedical Nanotechnology”, CRC Press, 2005

REFERENCE BOOKS:

• 1. Marc J Madou, “Fundamentals of Microfabrication and Nanotechnology”, CRC Press, 2011.
• 2. Hari Singh Nalwa, “Encyclopedia of Nanoscience and Nanotechnology”, American Scientific Publishers, 2004.
• 3. ELLIS MENG, “Biomedical Microsystems”, CRC Press, 2011