JAWAHARLAL NEHRU TECHNOLOGICAL UNIVERSITY HYDERABAD

UNIT - I

Introduction to MEMS: MEMS, Use of MEMS, Fabrication process. The Substrate and adding material to it: Introduction, The silicon substrate, Additive technique- Oxidation, Additive technique- Physical vapor deposition, other additive techniques.

UNIT - II

MEMS Fabrication: Creating and transferring patterns: Photolithography- Introduction, Keeping it clean, Photoresist, Working with resist, Masks, Resolution, Permanent resists. Creating structures-Micromachining: Introduction, Bulk Micromachining processes, Surface Micromachining, Process Integration.

UNIT - III

MEMS Transducers - I: Modelling: Units, The input-output concept, Physical variables and notation, Preface to the modeling chapters. MEMS Transducers: An overview-Transducer, Distinguishing between sensors and actuators, Response characteristics of transducers, MEMS Sensors- Principles of operation, MEMS Actuators- Principles of operation, Signal conditioning, RF applications and Optical applications. Piezoresistive Transducers: Introduction, Modeling Piezoresistive transducers, Piezoresistive pressure sensor.

UNIT - IV

MEMS Transducers - II: Capacitive Transducers: Introduction, Capacitor fundamentals, Modeling a capacitor sensor, Capacitive accelerometer.

UNIT - V

MEMS Transducers - III: Piezoelectric Transducers: Introduction, Modeling piezoelectric materials, Mechanical modelling of beams and plates, Cantilever piezoelectric actuator. Thermal Transducers: Introduction, Basic heat transfer, Hot-arm actuator.

TEXT BOOKS:

• 1. Adams, Thomas M., Layton, Richard A., “Introductory MEMS Fabrication and Applications”, Springer.

REFERENCE BOOKS:

• 1. Tai-Ran Hsu, “MEMS and Microsystems- Design and Manufacture”, McGraw-Hill, 2002.
• 2. Mohamed Gad-el-Hak, “MEMS-Applications”, CRC Press, 29-Nov-2005. M. TECH. I YEAR II SEMESTER ELECTRONICS & INSTRUMENTATION