JAWAHARLAL NEHRU TECHNOLOGICAL UNIVERSITY HYDERABAD

Course Outcomes

At the end of the course, the student is able to

• To understand the evolution of Nano systems, and various fabrication techniques.
• Learn about nano materials and various nano measurements techniques.

UNIT - I

Over View of Nanotechnology: Definition – historical development – properties, design and fabrication Nanosystems, working principle, applications and advantages of nano system. Nanomaterials – ordered oxides – Nano arrays – potential health effects

UNIT - II

Nanodefects, Nano Partiles and Nanolayers: Nanodefects in crystals – applications – Nuclear Track nano defects. Fabrication of nano particles – LASER ablation – sol gels – precipitation of quantum dots. Nano layers – PVD, CVD, Epitaxy and ion implantation – formation of Silicon oxide- chemical composition – doping properties – optical properties

UNIT - III

Nanostructuring: Nanophotolithography – introduction – techniques – optical – electron beam – ion beam – X-ray and Synchrotron – nanolithography for microelectronic industry – nanopolishign of Diamond – Etching of Nano structures – Nano imprinting technology – Focused ion beams - LASER interference Lithography nanoarrays –Near-Field Optics - case studies and Trends

UNIT - IV

Science and Synthesis of Nano Materials: Classification of nano structures – Effects of nano scale dimensions on various properties – structural, thermal, chemical, magnetic, optical and electronic properties fluid dynamics –Effect of nano scale dimensions on mechanical properties - vibration, bending, fracture Nanoparticles, Sol-Gel Synthesis, Inert Gas Condensation, High energy Ball Milling, Plasma Synthesis, Electro deposition and other techniques. Synthesis of Carbon nanotubes – Solid carbon source based production techniques – Gaseous carbon source based production techniques – Diamond like carbon coating. Top down and bottom up processes

UNIT - V

Characterization of Nano Materials: Nano-processing systems – Nano measuring systems – characterization – analytical imaging techniques – microscopy techniques, electron microscopy scanning electron microscopy, confocal LASER scanning microscopy - transmission electron microscopy, transmission electron microscopy, scanning tunneling microscopy, atomic force microscopy, diffraction techniques – spectroscopy techniques – Raman spectroscopy, 3D surface analysis – Mechanical, Magnetic and thermal properties – Nano positioning systems.

TEXT BOOKS:

• 1. Tai – Ran Hsu, MEMS and Microsystems Design and Manufacture, Tata-McGraw Hill, New Delhi, 2002.
• 2. FahrnerW.R., Nanotechnology and Nanoelectronics, Springer (India) Private Ltd., 2011.
• 3. Mark Madou, Fundamentals of Microfabrication, CRC Press, New York, 1997.
• 4. Norio Taniguchi, Nano Technology, Oxford University Press, New York, 2003.

REFERENCES:

• 1. Mohamed Gad-el-Hak, MEMS Handbook, CRC press, 2006, ISBN: 8493-9138-5. R19 M.Tech. Mechatronics
• 2. Waqar Ahmed and Mark J. Jackson, Emerging Nanotechnologies for Manufacturing, Elsevier Inc., 2013, ISBN: 978-93-82291-39-8 29.
• 3. Sami Franssila, Introduction to Micro fabrication, John Wiley & sons Ltd, 2004. ISBN: 470- 85106-6.
• 4. Charles P Poole, Frank J Owens, Introduction to Nano technology, John Wiley and Sons, 2003.
• 5. Julian W. Hardner Micro Sensors, Principles and Applications, CRC Press 1993. R19 M.Tech. Mechatronics M. TECH. II Year I Sem. (MECHATRONICS)