Jawaharlal Nehru Technological University Hyderabad
Jawaharlal Nehru Technological University Hyderabad B.Tech IV MEMS DESIGN Previous Question Paper (June - 2024 - R16)
Note: i) Question paper consists of Part A, Part B. ii) Part A is compulsory, which carries 25 marks. In Part A, Answer all questions. iii) In Part B, Answer any one question from each unit. Each question carries 10 marks and may have a, b as sub questions.
Part A
What is on Thin film deposition?
Answer
Thin film deposition is a vacuum-based process used to apply a thin layer of material, ranging from nanometers to micrometers in thickness, onto a substrate surface. It is a fundamental technique in MEMS fabrication for creating structural, sacrificial, or functional layers.
What is impurity doping?
Answer
Impurity doping is the process of introducing controlled amounts of specific impurities (dopants) into a semiconductor material, such as silicon, to modify its electrical properties. This process increases the carrier concentration, thereby altering the conductivity of the material to create p-type or n-type regions.
Differentiate fluid systems and thermal systems.
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Give few applications of passive mechanical systems.
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List out various types of pressure measurement devices.
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Explain the micro hot plate gas sensors.
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Explain the use of optical switch.
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What is the need for a beam splitter?
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Explain the role of Radio frequency in MEMS.
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Write about Phase shifter.
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Part B
What is lithography?
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With the help of suitable diagrams, explain various lithographic techniques.
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Discuss the challenges faced by the MEMS industry.
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Describe various steps in surface micro machining with neat sketches.
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What are various basic modeling elements in electrical systems? Explain.
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Write down the significance and applications of passive electronic systems.
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What are various basic modeling elements in thermal systems? Explain.
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Explain the spring mass damper system with an example.
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Explain the principles of sensing and actuation.
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Discuss the principle of Peltier effect heat pump.
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What is function of piezo electric material? How it acts as sensing and actuating element?
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What are shape memory alloys? Explain.
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How many types of MEMS micro lens do you know? Explain their design features.
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Write a short note on digital micro mirror device.
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Write short notes on micro mirror.
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Describe the principle of operation of magnetic actuation and the deposition process of magnetic materials.
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Write the characteristics of RF MEMS system.
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What is an inductor? What types of MEMS inductors do you know?
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Discuss the principle of operation of a typical MEMS switch used in RF applications.
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Explain the working of RF based communication system.
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