JNTU
JNTU B.Tech IV MEMS DESIGN Previous Question Paper (May - 2019 - R15)
Part A is compulsory. Part B consists of 5 Units. Answer any one full question from each unit.
Part A
Answer all questions:
Explain the role of nanotechnology in MEMS fabrication.
Answer
Nanotechnology enables the fabrication of MEMS devices with feature sizes in the nanometer range, allowing for higher integration density, improved sensitivity, and the incorporation of novel material properties (such as carbon nanotubes or nanowires) that enhance mechanical, electrical, and thermal performance beyond conventional micro-scale limits.
Differentiate between structural and sacrificial materials.
Answer
Structural materials are used to form the functional mechanical components of a MEMS device (e.g., polysilicon, silicon nitride) and must possess high mechanical strength and stability. Sacrificial materials (e.g., phosphosilicate glass, photoresist) are used as temporary spacers or support layers that are etched away during the final stages of fabrication to release the structural components and allow them to move freely.
List out the basic modeling elements in electrical system.
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What are the features of passive electronic systems?
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Explain the working principle of peltier effect heat pump.
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Give the characteristics of shape memory alloys.
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What are the uses of beam splitter?
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Explain the principle of optical switch.
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What are the applications of MEMS inductors?
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Explain the working of MEMS based phase shifter.
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Unit I
Describe bio and chemo devises.
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Explain various stages at which impurity doping is done in MEMS fabrication.
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Explain the steps involved in photolithography.
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Differentiate between bulk and surface micromachining.
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Unit II
Explain the features of passive mechanical systems.
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Describe the basic modeling elements of fluid systems.
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Explain the steps involved in the modeling of pure mechanical system with spring, damper and mass.
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Unit III
With the help of suitable diagrams explain how flow measurement can be done using integrated paddle-cantilever structure.
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Explain the steps involved in the fabrication of micro-machined thermocouple probe and explain its working.
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Unit IV
What is a digital micro mirror device? What are its functions?
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Explain the working of magnetic actuator.
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What is micro lens? Explain their application.
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Describe a MEMS based waveguide and tuner.
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Unit V
With the help of a neat sketch give the description and explain the working of micro-fluidic system.
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Discuss the functional issues of MEMS resonators.
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Explain the features of filters.
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