JNTU
JNTU B.Tech IV MEMS DESIGN Previous Question Paper (July - 2019 - R15)
Part A is compulsory. Answer all questions in Part A. Part B consists of 5 Units. Answer any one full question from each unit.
Part A
Mention methods used in thin film deposition.
Answer
The primary methods for thin film deposition are Physical Vapor Deposition (PVD), such as sputtering and evaporation, and Chemical Vapor Deposition (CVD), including Low-Pressure CVD (LPCVD) and Plasma-Enhanced CVD (PECVD). Other techniques include electroplating and spin coating.
What are various problems encountered in case of bulk micro machining?
Answer
Bulk micromachining faces challenges such as crystal orientation dependency during wet etching, the need for large areas for etching through the entire wafer thickness, potential damage to delicate structures due to long exposure to etchants, and difficulty in achieving high-aspect-ratio features compared to surface micromachining.
List out various types of modeling system
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Give few applications of passive electronic systems
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Distinguish thermister and thermocouple?
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What is principle of actuation? Give example for actuating elements
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What is fundamental principle involved in MOEMS Technology
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What are various devices used as light detectors?
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What is RF based communication system?
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Mention few applications of RF based mems.
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Unit I
With the help of line diagram explain the X-ray lithography process.
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What is etching? Compare and contrast dry and wet etching.
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Explain various Bio and Chemo devices used in MEMS.
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Write in detail about impurity doping.
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Unit II
What are various basic modeling elements in mechanical systems? Explain.
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Write down the significance and applications of passive mechanical systems.
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What are various basic modeling elements in electrical systems? Explain.
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Explain the need for system modeling.
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Unit III
Write the function of electrochemical actuator. What are different types of electrochemical actuators and materials used?
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What is function of Piezo electric material? How it acts as a sensing and actuating element?
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Explain how flow measurement can be carried out using integrated paddle-cantilever structure.
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What are various techniques used for strain measurement?
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Unit IV
Explain the applications of grating light valve.
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What is the need for a beam splitter? Explain.
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What are light modulators? Explain their working.
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Give various types of micro mirrors, explain their applications.
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Unit V
Explain the working of RF based communication system.
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Write about i) MEMS switches and ii) Phase shifter.
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Explain the thermo capillary effect observed in micro fluidic system.
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Distinguish and explain the devices tuner, filter and resonator.
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